SM16S_10510:Thu:1455:124
XXI International Congress of Theoretical and Applied Mechanics
Warsaw, Poland, August 15-21, 2004

Stability Analyses of Electrostatic Torsional RF MEMS Switch

Ya - Pu Zhao, Jian - Gang Guo
LNM, Institute of Mechanics, Chinese Academy of Sciences, Beijing, China


The stability analyses of the electrostatic torsional RF MEMS (radio frequency micro-electro-mechanical systems) Switch are presented in the paper with the consideration of van der Waals (vdW) force. The critical applied voltage and tilting angle are calculated by static equilibrium equations. Furthermore, the dynamic behavior of RF MEMS switch is studied by the qualitative analysis of nonlinear equation of motion.



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