SM18L_10797:Fri:0930:213
XXI International Congress of Theoretical and Applied Mechanics
Warsaw, Poland, August 15-21, 2004

Calibration of Anisotropic Elastic - Plastic Models for Thin Layers and Foils in Microtechnologies: Two Novel Techniques

Massimiliano Bocciarelli, Gabriella Bolzon, Giulio Maier
Politecnico di Milano, Miano, Italy


The methods presented in this paper for the identification of material parameters in anisotropic elastoplasticity at the microscale exhibit the following new features in their experimental stage: data gathered from both indentation curves and imprint mapping in the former technique, which is intended for the mechanical characterisation of thin layers on substrate; in the latter, a device which pressurises a free foil specimen and measures the geometry of the inflated membrane by a laser profilometer. At the computational stage, traditional least-square techniques are employed for the inverse analysis based on finite-element large-strain simulations, which are used also for sensitivity analyses.



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